new functional optical films magnetron sputtering process and physical properties

Title: new functional optical films magnetron sputtering process and physical properties of Author: Huang Feng Degree awarded: China University of Science and Technology Keywords: optical thin film;; high temperature membrane;; thermal stability;; self-cleaning film;; photocatalysis;; super-hydrophilic Abstract:
Optical functional films related to the optoelectronics industry, national defense, environmental science and other fields, has a strong application background. Strong magnets This article was prepared by magnetron sputtering of several new optical functional films, including: SiO_x film, YSZ high temperature optical film, TiO_2 and self-cleaning photocatalytic film. By screening the material, the film microstructure and properties of materials, regulation, and the preparation process of research and optimization, made some practical value of research results. The article also affect the optical film properties and mechanism of the internal factors are analyzed and discussed.
The specific thesis research content and results are as follows:
1 prepared by reactive magnetron sputtering with different degrees of SiO_x oxide film annealed at different temperatures was studied for its optical parameters. Discussed SiO_x material system after annealing at different temperatures, thin films the evolution of structure and composition, including its composition changes caused by phase separation, the release of stress annealing on the samples and the repair of the defect, and the film reflects the different degree of oxidation mechanism of the rate of change.
2 films for optical applications at high temperatures studied Nb_2O_5, Ta_2O_5 and other traditional materials in optical thin-film microstructure and high temperature degradation of the optical parameters; made a yttria-stabilized zirconia (YSZ) thin film materials in the field of high-temperature applications . From the micro-structure of the optical parameters and discussed the stability of YSZ thin films and heat-resistance mechanism. Obtained YSZ/SiO_2 multilayer optics optical properties at 800 ℃ without significant degradation. The result extends the optical film at high temperature under the conditions of application.
3 found that the precursor of ZnO thin film layer on the crystallization of TiO_2 enhanced effects, and to study the mechanism of the enhancement. Proposed to regulate the use of ZnO precursor layer TiO_2 film crystallinity and surface roughness of the http://www.chinamagnets.biz/Neodymium/Ball-Neodymium-Magnets.php method to study the TiO_2/ZnO films and self-cleaning photocatalytic performance and influencing factors. Magnetron sputtering thin film layer structure obtained TiO_2/ZnO showed more favorable than the single-layer film TiO_2 photocatalytic activity and hydrophilic. This result has good prospects for industrial applications. Degree Year: 2009